SEMI S2 Evaluation |SEMI certification | Refcco
SEMI S2 |SEMI
certification |SEMI S2 evaluation
SEMI
S2 is the safety guideline developed by the Semiconductor Equipment and
Materials International (SEMI), which are documents defining the minimum safety
requirements required for your semiconductor products. Additionally,
conforming to SEMI S2 contributes to the marketability of your products as some
companies and distributers will not purchase a product without conformance to
SEMI guidelines. On top of SEMI S2 guidelines, there are other SEMI safety
guidelines such as SEMI S1 for Equipment Safety Labels and SEMI S8 for
Ergonomics Engineering of Semiconductors. We can evaluate product’s
construction, perform necessary tests and provide a report to all applicable
section of SEMI S2 and the specific SEMI Guidelines referenced (S1, S3, S8, S14, and S22).
SEMI S2
SEMI S2 is
the basis of semiconductor equipment safety programs. The standards written by
the SEMI organization led the way for safety of
semiconductor manufacturing equipment and the handling of hazardous
semiconductor manufacturing materials. This is to say, SEMI is the key
semiconductor industry standards body. Throughout the industry, you will find that
these standards are required for your equipment to achieve customer
acceptance. With literally thousands of pieces of equipment implemented
through our company, we certainly have the background and depth to support you
through design, testing, evaluation and certification.
Types Of Equipment
SEMI S2 is applicable to all
types of semiconductor manufacturing equipment. SEMI S2 applies to Ion
Implanters, Litho Equipment, and wet benches. It applies to etchers, mask
aligners, CVD, Saws, Spin Coaters and any other equipment in the Fab. Etchers,
Implanters, Clean Tracks, Chemical Dispense Systems, Bulk Gas Distribution, Gas
Cabinets, Gas Source Cabinets, Metrology Systems, Test Systems, CMP Systems,
Furna ces,
Sub-Systems, and Industrial Lasers.
Summary Of The
Standard & Safety Guidelines
SEMI S2 was created by the semiconductor equipment industry. The goal
of SEMI S2 is to increase semiconductor equipment safety. SEMI S2 includes
Safety labeling, SEMI S2 Quitman design, SEMI S2 operator interface, SEMI S2
and SEMI S8 ergonomics, SEMI S2 safety interlock systems, SEMI S2 emergency
shutdown, SEMI S2 electrical design, SEMI S2 fire protection, SEMI S2 heated
chemical baths, SEMI S2 hazardous energy isolation, SEMI S2 lockout, SEMI S2
mechanical design, SEMI S2 seismic protection, SEMI S2 automated material
handling equipment, SEMI S2 environmental considerations, SEMI S2 exhaust
ventilation, SEMI S2 chemicals, SEMI S2 ionizing radiation, SEMI S2
non-ionizing radiation, SEMI S2, lasers, SEMI S2 sound pressure level
measurement, and SEMI S2 fire protection.
To ensure a standard of
safety throughout the industry and worldwide, the semiconductor equipment
industry developed the SEMI S2/S8 Guidelines. They cover a wide range of safety
and health provisions, e.g. regulatory requirements, electrical and chemical
hazards, emergency shutdown and exhaust specifications.
TÜV Rheinland provides SEMI S2
and S8 assessment as Type Approval or of each machine to the latest version of
the guideline.
The certificate remains
valid unless the standard(s) expire or the client or TÜV Rheinland cancels the
certificate. The certificate becomes invalid if the product is altered.
Assessment and certification is voluntary. Certified products may be labeled
with a test mark.
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